Roughness measurements by spectroscopic ellipsometry

Applied Optics

Volumn 24, Issue 22, 1985, Pages 3773-3779

  Blanco, J R ^a   McMarr, P J ^a   Vedam, K ^a  

^a PENNSYLVANIA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039907907     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.24.003773     Document Type: Article

References (46)

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