Initial stages in the growth of carbon films produced in an Ar-CH4-H2 microwave discharge: Composition and surface layers morphology

Applied Physics Letters

Volumn 68, Issue 12, 1996, Pages 1634-1636

  Thomas, L ^a   Jauberteau, I ^a   Jauberteau, J L ^a   Cinelli, M J ^a   Aubreton, J ^a   Catherinot, A ^a  

^a CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039612644     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.115675     Document Type: Article

References (16)

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