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Volumn 69, Issue 11, 1998, Pages 3818-3827
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Description of a dust particle detection system and measurements of particulate contamination from shock, gate valve, and ion pump under ultrahigh vacuum conditions
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0039608368
PISSN: 00346748
EISSN: None
Source Type: Journal
DOI: 10.1063/1.1149184 Document Type: Article |
Times cited : (5)
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References (15)
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