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Volumn 57, Issue 24, 1990, Pages 2573-2575

Anomalous capacitance-voltage characteristics of BF2-implanted and rapid thermal annealed p+-polycrystalline silicon gate metal-oxide-semiconductor structures

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Indexed keywords


EID: 0039578981     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.103819     Document Type: Article
Times cited : (13)

References (15)


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.