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Volumn 57, Issue 24, 1990, Pages 2573-2575
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Anomalous capacitance-voltage characteristics of BF2-implanted and rapid thermal annealed p+-polycrystalline silicon gate metal-oxide-semiconductor structures
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Author keywords
[No Author keywords available]
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Indexed keywords
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EID: 0039578981
PISSN: 00036951
EISSN: None
Source Type: Journal
DOI: 10.1063/1.103819 Document Type: Article |
Times cited : (13)
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References (15)
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