New graphite liquid metal ion source geometry developed for corrosive metal. Application to an aluminium ion source

Microelectronic Engineering

Volumn 30, Issue 1-4, 1996, Pages 261-264

  Gierak, J ^b   Ben Assayag, G ^a  

^a CEMES CNRS   (France)

^b CNRS   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; GEOMETRY; GRAPHITE; HEATING EQUIPMENT; ION IMPLANTATION; ION MICROSCOPES; LIQUID METALS; MICROMACHINING; SURFACES; WETTING;

CORROSIVE METAL; HEATING ELEMENT; LIQUID METAL ION SOURCES; WETTABILITY;

ION SOURCES;

EID: 0039564850     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/0167-9317(95)00241-3     Document Type: Article

References (5)

1. A. E. Bell, G. A. Schwind and L. W. Swanson, J. Appl. Phys. 53(7), July 1982 4602-4605
2. K. Sakaguchi and K. Mihana, J. Appl. Phys. 70(9), November 1991 5049-5053
3. CNRS patent No94 08395
4. G. Benassayag, P. Sudraud, J. Gierak, D. Remiens, L. Menigaux, L. Dugrand, Microelec. Eng. 11 (1990) 413-416
5. G. Benassayag, C. Vieu, J. Gierak, R. Planel, M. Schneider and J. Y. Marzin, J. Vac. Sci Technol. B9 (5) 2679 1991