A high-current ion accelerator for short-pulse ion implantation

Instruments and Experimental Techniques

Volumn 40, Issue 5, 1997, Pages 727-731

  Remnev, G E ^a   Opekunov, M S ^a   Vasil'ev, V V ^a   Lukonin, E I ^a   Matvienko, V M ^a   Furman, E G ^a  

^a TOMSK POLYTECHNIC UNIVERSITY   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039540033     PISSN: 00204412     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (23)

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