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Volumn 222, Issue 3, 1996, Pages 199-202
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Carbon thin films through laser ablation
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Author keywords
[No Author keywords available]
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Indexed keywords
ARGON LASERS;
LASER ABLATION;
NEODYMIUM LASERS;
OPTICAL CORRELATION;
SCANNING ELECTRON MICROSCOPY;
THIN FILMS;
YTTRIUM ALUMINUM GARNET;
ARGON GAS;
ARGON GAS PRESSURE;
CARBON THIN FILMS;
FILM QUALITY;
ND : YAG LASERS;
OPTICAL EMISSIONS;
SILICON SUBSTRATES;
THIN CARBON FILMS;
CARBON FILMS;
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EID: 0039516303
PISSN: 03759601
EISSN: None
Source Type: Journal
DOI: 10.1016/0375-9601(96)00613-5 Document Type: Article |
Times cited : (10)
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References (16)
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