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Volumn 6, Issue 8, 1997, Pages 1000-1004

A factorial analysis of the preparation and properties of a-C:H thin films

Author keywords

Amorphous hydrogenated carbon; Chemical vapour deposition

Indexed keywords


EID: 0039383759     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00741-8     Document Type: Article
Times cited : (3)

References (17)
  • 11
    • 0041810083 scopus 로고
    • Dissertation presented to the Faculty of the University of Texas at Dallas
    • J.W. Glesener, Dissertation presented to the Faculty of the University of Texas at Dallas (1990).
    • (1990)
    • Glesener, J.W.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.