Effects of Mo(CO)6 and W(CO)6 introduced to plasma on diamond synthesis by microwave plasma CVD

Diamond and Related Materials

Volumn 6, Issue 2-4, 1997, Pages 501-504

  Nagano, Masamitsu ^a   Urasaki, Takashi ^a   Wakiyama, Kazuhiro ^a   Komori, Masaharu ^a  

^a SAGA UNIVERSITY   (Japan)

Author keywords

Carbonyl; Metal; Plasma diagnostics; Spectroscopy

Indexed keywords

EID: 0039372742     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(96)00655-3     Document Type: Article

References (4)

1. G. Popovici and M.A. Prela, Diamond Relat. Mater., 4 (1995) 1305-1310.
2. H. Ichinose, Y. Nibu, H. Katsuki, M. Nagano, Jpn. J. Appl. Phys., 32 (1993) 144-149.
3. M. Nagano, T. Nagao, H. Mishima and H. Ichinose, in S. Saito et al. (eds.), Advances in New Diamond Science and Technology, MYU, Tokyo, 1994, pp. 49-52.
4. W. Piekarczyk and W.A. Yarbrough, J. Cryst. Growth, 108 (1991) 583-597.