Extraction of molecular negative-ion beams of CN from radio frequency plasma-sputter-type heavy negative ion source for negative-ion beam deposition

Review of Scientific Instruments

Volumn 69, Issue 2, 1998, Pages 884-886

  Tsuji, Hiroshi ^a   Ishikawa, Junzo ^a   Tomita, Tetsuo ^a   Yoshihara, Takaaki ^a   Gotoh, Yasuhito ^a  

^a KYOTO UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039371140     PISSN: 00346748     EISSN: 10897623     Source Type: Journal    
DOI: 10.1063/1.1148628     Document Type: Conference Paper

References (11)

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