The reasonably good status of 300mm wafer-processing tools

Solid State Technology

Volumn 43, Issue 10, 2000, Pages 79-90

  Irwin, James A ^a  

^a Irwin Consulting   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039329884     PISSN: 0038111X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (5)

1. From SEMI STEP program: SEMI 300mm Software Standards, SEMICON/West 2000.
2. See http:www.sematech.org/public/resources/300mm/index.htm.
3. Version 5 of the CIM GJG document is available at the SEMATECH web site www.sematech.org/public/docubase/document/3534deng.pdf.
4. H. Miyatake, Selete overview of 300mm program (Phase 1) and new programs, presented at SEMI Technical Programs, SEMICON/West 2000.
5. STEP: Quantifying Equipment Productivity - The SEMI E79 Standard, July 10, 2000, SEMI, Rob Leachman's talk, "Understanding Fab Economics." Also see www.euler.berkeley.edu/esrc/csm.