An optical instrument for overall stress and local stress relaxation analysis in thin metal films

Review of Scientific Instruments

Volumn 68, Issue 1, 1997, Pages 143-149

  Kylner, Carina ^a,b   Mattsson, Lars ^b  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b ACREO AB   (Sweden)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039205065     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1147850     Document Type: Article

References (16)

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