Mechanisms of Thermal Nitridation of Silicon

Journal of the Electrochemical Society

Volumn 142, Issue 4, 1995, Pages 1205-1214

  Ganem, J J ^b   Rigo, S ^b   Trimaille, I ^b  

^a FEDERAL UNIVERSITY OF RIO GRANDE DO SUL   (Brazil)

^b UNIVERSITÉ PARIS DESCARTES   (France)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039199103     PISSN: 00134651     EISSN: 19457111     Source Type: Journal    
DOI: 10.1149/1.2044153     Document Type: Article

References (40)

1. T. Ito, T. Nozaki, H. Arakawa, and M. Shinoda, Appl. Phys. Lett., 32, 330 (1978).
2. T. Ito, T. Nakamura, and H. Ishikawa, IEEE Trans. Electron Devices, ED-29, 498 (1982).
3. M. M. Moslehi and K. C. Saraswat, IEEE Trans. Electron Devices, ED-32, 106 (1985).
4. P. Fahey, G. Barbuscia, M. Moslehi, and R. W. Dutton, Appl. Phys. Lett., 46, 784 (1985).
5. M. A. Sobolewsky and C. R. Helms, Appl. Surf. Sci., 30, 210 (1987).
6. J. W. Evans and and S. K. Chatterji, J. Phys. Chem., 62, 1064 (1958).
7. S. P. Murarka, C. C. Chang, and A. C. Adams, Journal of the Electrochemical Society, 126, 996 (1979).
8. Y. Hayafuji and K. Kajiwara, Journal of the Electrochemical Society, 129, 2102 (1982).
9. J.-J. Ganem, S. Rigo, I. Trimaille, G. N. Lu, and P. Molle, Nucl. Instrum. Methods, B64, 778 (1992).
10. A. Glachant, D. Saidi, and J. F. Delord, Surf. Sci., 168, 672 (1986).
11. P. A. Taylor. R. M. Wallace, W. J. Choyke, M. J. Dresser, and J. T. Yates, Jr., Surf. Sci., 215, L286 (1989).
12. S. W. Sun, P. J. Tobin, J. Weihmeir, and E. Reed, Journal of the Electrochemical Society, 1799 (1987).
13. T. Ito, S. Hijiya, T. Nozaki, H. Arakawa, M. Shinoda, and Y. Fukukawa, Journal of the Electrochemical Society, 125, 448 (1978).
14. C. Wu, C. King, M. Lee, and C. Chen, Journal of the Electrochemical Society, 129, 1559 (1982).
15. C. Maillot, H. Roulet. G. Dufour, F. Rochet, and S. Rigo, Appl. Surf. Sci., 26, 326 (1986).
16. S. Rigo. F. Rochet. B. Agius, and A. Straboni, Journal of the Electrochemical Society, 129, 867 (1982).
17. I. Trimaille and S. Rigo, Appl. Surf. Sci., 39, 65 (1989).
18. C. Maillot, H. Roulet, and G. Dufour, J. Vac. Sci. Technol, B2, 316 (1984).
19. C. C. Chang, A. Kamgar, and D. Kahng, IEEE Electron Device Lett., EDL-6, 476 (1985).
20. W. Yang, R. Jayaraman, and C. G. Sodini, IEEE Trans. Electron Devices, ED-35, 935 (1988).
21. T. Hori, H. Iwasaki, Y. Naito, and H. Esaki, IEEE Trans. Electron Devices, ED-34, 2238 (1987).
22. F. Rochet, B. Agius, and S. Rigo, Journal of the Electrochemical Society, 131, 914 (1984).
23. J. J. Ganem, Ph.D. Thesis, Université Paris 7 (1992).
24. J. J. Ganem, S. Rigo, I. Trimaille, and G. N. Lu, Nucl. Instrum. Methods, B, 64, 784 (1992).
25. S. Rigo, G. Amsel, and M. Croset, J. Appl. Phys., 47, 2800 (1976).
26. A. Bosseboeuf, B. Agius, and S. Rigo, Journal of the Electrochemical Society, 133, 810 (1986).
27. D. Dieumegard, D. Dubreuil and G. Amsel, Nucl. Instrum. Methods, 166, 431 (1979).
28. B. Maurel and G. Amsel, Nucl. Instrum. Methods, 218, 159 (1983).
29. G. Amsel, C. Cohen, and B. Maurel, Nucl. Instrum. Methods B, 14, 226 (1986).
30. G. Amsel, E. d’Artemare, and E. Girard, Nucl. Instrum. Methods, 205, 5 (1983).
31. I. Vikridge and G. Amsel, Nucl. Instrum. Methods B, 45, 6 (1990).
32. G. Battistig, G. Amsel, E. d’Artemare, and I. Vickridge, Nucl. Instrum. Methods, 61, 369 (1991).
33. F. C. Stedile, I. J. R. Baumvol, J. J. Ganem, S. Rigo, I. Trimaille, G. Battistig, H. Schulte, and H. W. Becker, Nucl. Instrum. Methods, 85, 248 (1994).
34. G. Batisttig, G. Amsel, I. Trimaille, J. J. Ganem, S. Rigo, F. C. Stedile, and I. J. R. Baumvol, Nucl. Instrum. Methods, 85, 326 (1994).
35. A. M. Stoneham, C. R. M. Grosvenor, and A. Cerezo, Philos. Mag., B55, 201 (1987);
36. G. Dufour, F. Rochet, H. Roulet, and F. Sirotti, Surf. Sci., 304, 33 (1994).
37. C. U. S. Larsson and A. S. Flodstrom, Surf. Sci, 241, 353 (1991).
38. C. U. S. Larsson, C. B. M. Andersson, N. P. Prince, and A. S. Flodstrom, Surf. Sci, 271, 349 (1992).
39. J. L. Bischoff, F. Lutz, D. Bolmont, and L. Kubler, Flodstrom, Surf. Sci, 251/252, 170 (1991).
40. N. Cabrera and N. F. Mott, Rep. Prog. Phys., 12, 163 (1949).