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Volumn 8, Issue 2-5, 1999, Pages 352-356

Reaction of palladium thin films with an Si-rich 6H-SiC(0001)(3×3) surface

Author keywords

6H SiC(0001); Interface formation; Palladium; Thin films

Indexed keywords

ANNEALING; CRYSTAL ORIENTATION; DEPOSITION; EVAPORATION; INTERFACES (MATERIALS); MONOLAYERS; PALLADIUM; SEMICONDUCTING SILICON COMPOUNDS; SILICON CARBIDE; THERMAL EFFECTS; THIN FILMS; VACUUM APPLICATIONS;

EID: 0039184020     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0925-9635(98)00433-6     Document Type: Review
Times cited : (12)

References (11)
  • 11
    • 0000112472 scopus 로고
    • Formation and characterization of transition-metal silicides
    • in: N.G. Einspruch (Ed.) Academic Press
    • M.-A. Nicolet, Formation and characterization of transition-metal silicides, in: N.G. Einspruch (Ed.), VLSI Electronics, Academic Press, 1983.
    • (1983) VLSI Electronics
    • Nicolet, M.-A.1


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.