Evaluation of a new Ba precursor, Ba(DPM)2-2tetraen, for MOCVD of oxide superconductors

Materials Science and Engineering B

Volumn B54, Issue 1-2, 1998, Pages 104-107

  Zama, Hideaki ^a   Tanaka, Nobue ^a   Morishita, Tadataka ^a  

^a SUPERCONDUCTIVITY RESEARCH LABORATORY   (Japan)

Author keywords

Ba(DPM)2 2tetraen; Metalorganic chemical vapor deposition (MOCVD); YBa2Cu3Ox thin film

Indexed keywords

BARIUM; BARIUM COMPOUNDS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; OPTIMIZATION; PEROVSKITE; THIN FILMS;

PRECURSORS;

OXIDE SUPERCONDUCTORS;

EID: 0039135859     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/s0921-5107(98)00136-6     Document Type: Article

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