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Journal of Applied Physics

Volumn 68, Issue 2, 1990, Pages 785-792

Damage to InP and InGaAsP surfaces resulting from CH4/H 2 reactive ion etching

(6) Hayes, Todd R a Chakrabarti, U K a Baiocchi, F A a Emerson, A B a Luftman, H S a Dautremont Smith, W C a

a LUCENT TECHNOLOGIES (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0039081753 PISSN: 00218979 EISSN: None Source Type: Journal
DOI: 10.1063/1.346758 Document Type: Article

Times cited : (62)

References (27)

1
- 0004541121
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1916
- Pang, S.W.¹ Goodhue, W.D.² Lyszczarz, T.M.³ Ehrlich, D.J.⁴ Goodman, R.B.⁵ Johnson, G.D.⁶

2
- 0022696487
- (1986) J. Electrochem. Soc. , vol.133 , pp. 784
- Pang, S.W.¹

3
- 0021141148
- (1985) J. Vac. Sci. Technol. B , vol.3 , pp. 398
- Pang, S.W.¹ Geis, M.W.² Efremow, N.N.³ Lincoln, G.A.⁴

4
- 0001160920
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1906
- Wong, H.F.¹ Green, D.L.² Liu, T.Y.³ Lishan, D.G.⁴ Bellis, M.⁵ Hu, E.L.⁶ Petroff, P.M.⁷ Holtz, P.O.⁸

5
- 0007041599
- (1989) J. Appl. Phys. , vol.65 , pp. 1281
- Pearton, S.J.¹ Vasile, M.J.² Jones, K.S.³ Short, K.T.⁴ Lane, E.⁵ Fullowan, T.R.⁶ Von Neida, A.E.⁷ Haegel, N.M.⁸

6
- 18144437630
- (1987) Proc. Electrochem. Soc. , vol.87‐6 , pp. 338
- Dautremont‐Smith, W.C.¹

7
- 0000648571
- (1989) Appl. Phys. Lett. , vol.55 , pp. 1633
- Pearton, S.J.¹ Chakrabarti, U.K.² Baiocchi, F.A.³

8
- 0000252854
- (1985) IOP Conf. Ser. , vol.79 , pp. 367
- Niggebrügge, U.¹ Klug, M.² Garus, G.³

9
- 0001684451
- (1989) J. Vac. Sci. Technol. B , vol.7 , pp. 1130
- Hayes, T.R.¹ Dreisbach, M.A.² Thomas, P.M.³ Dautremont‐Smith, W.C.⁴ Heimbrook, L.A.⁵

10
- 36549095830
- (1989) Appl. Phys. Lett. , vol.55 , pp. 56
- Hayes, T.R.¹ Dautremont‐Smith, W.C.² Luftman, H.S.³ Lee, J.W.⁴

11
- 0001108414
- (1986) J. Cryst. Growth , vol.74 , pp. 491
- Gault, W.A.¹ Monberg, E.M.² Clemans, J.E.³

12
- 84957225568
- For XPS studies of InP surfaces, see, and references therein.
- (1985) J. Vac. Sci. Technol. A , vol.3 , pp. 2082
- Hollinger, G.¹ Bergignat, E.² Joseph, J.³ Robach, Y.⁴

13
- 0004814110
- (1976) J. Electron Spectrosc. Relat. Phenom. , vol.9 , pp. 29
- Penn, D.R.¹

14
- 0004207084
- C. D. Wagner, W. M. Riggs, L. E. Davis, J. F. Moulder, G. E. Muilenberg, Eds, (Perkin‐Elraer Corporation, Physical Electronics Division, Eden Prairie, MN).
- (1979) Handbook of X‐ray Photoelectron Spectroscopy

15
- 0020782266
- (1983) Thin Solid Films , vol.105 , pp. 187
- Dautremont‐Smith, W.C.¹ Feldman, L.C.²

16
- 84950878752
- It is unclear why the ratio for wet‐etched surfaces is not closer to one; however, we focus on the change in the ratio upon RIE.

17
- 84950793433
- (unpublished results).
- Hayes, T.R.¹ Derkits, G.² Baiocchi, F.A.³

18
- 0019437507
- (1981) IEEE Trans. Electron Devices , vol.ED‐28 , pp. 1
- Morkoc, H.¹ Drummond, T.J.² Stanchak, C.M.³

19
- 33746204342
- (1989) J. Appl. Phys. , vol.66 , pp. 1993
- Dautremont‐Smith, W.C.¹ Lopata, J.² Pearton, S.J.³ Koszi, L.A.⁴ Stavola, M.⁵ Swaminathan, V.⁶

20
- 0021503936
- (1984) J. Vac. Sci. Technol. B , vol.2 , pp. 620
- Dautremont‐Smith, W.C.¹ Barnes, P.A.² Stayt, J.W.³

21
- 0018965153
- (1980) J. Electron. Mater. , vol.9 , pp. 67
- Skinner, D.K.¹

22
- 0004029837
- edited by R. K. Willardson and A. C. Beer (Academic, New York), Part A.
- (1971) Semiconductors and Semimetals , vol.7
- Padovani, F.A.¹

23
- 0019011017
- (1980) J. Appl. Phys. , vol.51 , pp. 2696
- Tsai, M.J.¹ Fahrenbruch, A.L.² Bube, R.H.³

24
- 0023382340
- (1987) Appl. Phys. A , vol.43 , pp. 153
- Pearton, S.J.¹ Corbett, J.W.² Shi, T.S.³

25
- 84950799422
- edited by M. Stavola, S. J. Pearton, and G. Davies, MRS Symp. Proc. 104 (Materials Research Society, Pittsburgh), and references therein.
- (1988) Defects in Electronic Materials
- Dautremont‐Smith, W.C.¹

26
- 84950890411
- Lannion, France, October.
- (1989) presented at Workshop on Hydrogen Effects in InP and Related Compounds
- Kazmierski, C.¹ Theys, B.² Rose, B.³ Mircea, A.⁴ Jalil, A.⁵ Chevallier, J.⁶

27
- 0004891635
- (1988) J. Vac. Sci. Technol. B , vol.6 , pp. 1911
- Cheung, R.¹ Thoms, S.² McIntyre, I.³ Wilkinson, C.D.W.⁴ Beaumont, S.P.⁵

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.