Experimental study and computer simulation of collimated sputtering of titanium thin films over topographical features

Journal of Applied Physics

Volumn 74, Issue 2, 1993, Pages 1339-1344

  Liu, D ^a   Dew, S K ^a   Brett, M J ^a   Janacek, T ^b   Smy, T ^b   Tsai, W ^c  

^a UNIVERSITY OF ALBERTA   (Canada)

^b CARLETON UNIVERSITY   (Canada)

^c VARIAN MEDICAL SYSTEMS   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038942806     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.354889     Document Type: Article

References (0)