-
1
-
-
85010176150
-
Phase shifting interferometers
-
D. Malacara, ed. (Wiley-Interscience, New York, Chap. 14
-
J. E. Greivenkamp and J. H. Bruning, “Phase shifting interferometers, ” in Optical Shop Testing, D. Malacara, ed. (Wiley-Interscience, New York, 1992), Chap. 14, pp. 501-598.
-
(1992)
Optical Shop Testing
, pp. 501-598
-
-
Greivenkamp, J.E.1
Bruning, J.H.2
-
2
-
-
0002020248
-
Spatial phase measurement methods
-
D. Robinson and G. T. Reid, eds. (Institute of Physics, Reading, UK, Chap. 5
-
M. Kujawinska, “Spatial phase measurement methods, ” in In-terferogram Analysis, D. Robinson and G. T. Reid, eds. (Institute of Physics, Reading, UK, 1993), Chap. 5, pp. 141-193.
-
(1993)
In-Terferogram Analysis
, pp. 141-193
-
-
Kujawinska, M.1
-
3
-
-
0026171866
-
Digital phase-step interferometry: A simplified approach
-
D. C. Williams, N. S. Nassar, J. E. Banyard, and M. S. Virdee, “Digital phase-step interferometry: a simplified approach, ” Opt. Laser Technol. 23, 147-150 (1991).
-
(1991)
Opt. Laser Technol.
, vol.23
, pp. 147-150
-
-
Williams, D.C.1
Nassar, N.S.2
Banyard, J.E.3
Virdee, M.S.4
-
4
-
-
0020919219
-
Fourier transform pro-filometry for the automatic measurement of 3-D object shapes
-
M. Takeda, H. Ina, and S. Kobayashi, “Fourier transform pro-filometry for the automatic measurement of 3-D object shapes, ” Appl. Opt. 22, 3977-3982 (1983).
-
(1983)
Appl. Opt.
, vol.22
, pp. 3977-3982
-
-
Takeda, M.1
Ina, H.2
Kobayashi, S.3
-
5
-
-
0021463845
-
Interferometric phase measurement using spatial synchronous detection
-
K. H. Womack, “Interferometric phase measurement using spatial synchronous detection, ” Opt. Eng. 23, 391-395 (1984).
-
(1984)
Opt. Eng.
, vol.23
, pp. 391-395
-
-
Womack, K.H.1
-
6
-
-
84975594400
-
Phase-shifting and logical moire
-
A. K. Asundi and K. H. Yung, “Phase-shifting and logical moire, ” J. Opt. Soc. Am. A 8, 1591-1600 (1991).
-
(1991)
J. Opt. Soc. Am. A
, vol.8
, pp. 1591-1600
-
-
Asundi, A.K.1
Yung, K.H.2
-
7
-
-
0020940715
-
Two-dimensional fringe-pattern analysis
-
W. W. Macy, “Two-dimensional fringe-pattern analysis, ” Appl. Opt. 22, 3898-3901 (1983).
-
(1983)
Appl. Opt.
, vol.22
, pp. 3898-3901
-
-
Macy, W.W.1
-
8
-
-
0042151841
-
Interferogram analysis based on the data-dependent systems method for nanometrology applications
-
S. M. Pandit and N. Jordache, “Interferogram analysis based on the data-dependent systems method for nanometrology applications, ” Appl. Opt. 34, 6695-6703 (1995).
-
(1995)
Appl. Opt.
, vol.34
, pp. 6695-6703
-
-
Pandit, S.M.1
Jordache, N.2
-
9
-
-
0021374417
-
Multichannel phase-shifted interferometer
-
O. Y. Kwon, “Multichannel phase-shifted interferometer, ” Opt. Lett. 9, 59-61 (1984).
-
(1984)
Opt. Lett.
, vol.9
, pp. 59-61
-
-
Kwon, O.Y.1
-
10
-
-
0016128770
-
Digital wavefront measuring interferometer for testing optical surfaces
-
J. H. Bruning, D. R. Herriot, J. E. Gallager, D. P. Rosenfeld, A. D. White, and D. J. Brangaccio, “Digital wavefront measuring interferometer for testing optical surfaces, ” Appl. Opt. 13, 2693-2703 (1974).
-
(1974)
Appl. Opt.
, vol.13
, pp. 2693-2703
-
-
Bruning, J.H.1
Herriot, D.R.2
Gallager, J.E.3
Rosenfeld, D.P.4
White, A.D.5
Brangaccio, D.J.6
-
11
-
-
18444384416
-
High-performance real-time heterodyne interferometry
-
N. A. Massie, R. D. Nelson, and S. Holly, “High-performance real-time heterodyne interferometry, ” Appl. Opt. 19, 154-160 (1978).
-
(1978)
Appl. Opt.
, vol.19
, pp. 154-160
-
-
Massie, N.A.1
Nelson, R.D.2
Holly, S.3
-
12
-
-
0018307283
-
Phase-locked interferometry
-
G. W. Johnson, D. C. Leiner, and D. T. Moore, “Phase-locked interferometry, ” Opt. Eng. 18, 46-52 (1979).
-
(1979)
Opt. Eng.
, vol.18
, pp. 46-52
-
-
Johnson, G.W.1
Leiner, D.C.2
Moore, D.T.3
-
13
-
-
69949166537
-
Sinusoidal phase modulating interferometry for surface profile measurement
-
O. Sasaki and H. Okazaki, “Sinusoidal phase modulating interferometry for surface profile measurement, ” Appl. Opt. 25, 3137-3140 (1986).
-
(1986)
Appl. Opt.
, vol.25
, pp. 3137-3140
-
-
Sasaki, O.1
Okazaki, H.2
-
14
-
-
84975625172
-
Semiconductor wafer technical flat planeness testing interferometer
-
J. Schwider, R. Burow, K.-E. Elssner, J. Grzanna, and R. Spo-laczyk, “Semiconductor wafer technical flat planeness testing interferometer, ” Appl. Opt. 25, 1117-1121 (1986).
-
(1986)
Appl. Opt.
, vol.25
, pp. 1117-1121
-
-
Schwider, J.1
Burow, R.2
Elssner, K.-E.3
Grzanna, J.4
Spo-Laczyk, R.5
-
15
-
-
0039481051
-
Fizeau phase-measuring interferometry using the moireí effect
-
B. V. Dorrío, A. F. Doval, C. Lopez, R. Soto, J. Blanco-García, J. L. Fernández, and M. Perez-Amor, “Fizeau phase-measuring interferometry using the moireí effect, ” Appl. Opt. 34, 3639-3643 (1995).
-
(1995)
Appl. Opt.
, vol.34
, pp. 3639-3643
-
-
Dorrío, B.V.1
Doval, A.F.2
Lopez, C.3
Soto, R.4
Blanco-García, J.5
Fernández, J.L.6
Perez-Amor, M.7
-
16
-
-
0038888305
-
Measurement range analysis in Fizeau phase-stepping interferometry using the moire effect
-
B. V. Dorrío, C. Lopez, A. F. Doval, J. M. Alen, J. Bugarín, A. Fernandez, J. Blanco-García, J. L. Fernandez, and M. Perez-Amor, “Measurement range analysis in Fizeau phase-stepping interferometry using the moire effect, ” Appl. Opt. 36, 3635-3644 (1997).
-
(1997)
Appl. Opt.
, vol.36
, pp. 3635-3644
-
-
Dorrío, B.V.1
Lopez, C.2
Doval, A.F.3
Alen, J.M.4
Bugarín, J.5
Fernandez, A.6
Blanco-García, J.7
Fernandez, J.L.8
Perez-Amor, M.9
-
17
-
-
0001271272
-
New contra old wavefront measurement concepts for interferometric optical testing
-
R. Joízwicki, M. Kujawinska, and L. Salbut, “New contra old wavefront measurement concepts for interferometric optical testing, ” Opt. Eng. 31, 422-433 (1992).
-
(1992)
Opt. Eng.
, vol.31
, pp. 422-433
-
-
Joízwicki, R.1
Kujawinska, M.2
Salbut, L.3
-
18
-
-
0016892621
-
Interferometric testing of smooth surfaces
-
E. Wolf, ed. (Wiley-Interscience, New York
-
G. Schultz and J. Schwider, “Interferometric testing of smooth surfaces, ” in Progress in Optics, E. Wolf, ed. (Wiley-Interscience, New York, 1992), pp. 93-167.
-
(1992)
Progress in Optics
, pp. 93-167
-
-
Schultz, G.1
Schwider, J.2
-
19
-
-
0001846125
-
Phase error calculation in a Fizeau interferometer by Fourier expansion of the intensity profile
-
B. V. Dorrío, J. Blanco-García, A. F. Doval, C. Lopez, R. Soto, J. L. Fernandez, and M. Perez-Amor, “Phase error calculation in a Fizeau interferometer by Fourier expansion of the intensity profile, ” Appl. Opt. 35, 61-64 (1996).
-
(1996)
Appl. Opt.
, vol.35
, pp. 61-64
-
-
Dorrío, B.V.1
Blanco-García, J.2
Doval, A.F.3
Lopez, C.4
Soto, R.5
Fernandez, J.L.6
Perez-Amor, M.7
-
20
-
-
0029288253
-
Phase shifting for nonsinusoidal waveforms with phase-shift errors
-
K. Hibino, B. F. Oreb, D. I. Farrant, and K. G. Oreb, “Phase shifting for nonsinusoidal waveforms with phase-shift errors, ” J. Opt. Soc. Am. A 12, 761-768 (1995).
-
(1995)
J. Opt. Soc. Am. A
, vol.12
, pp. 761-768
-
-
Hibino, K.1
Oreb, B.F.2
Farrant, D.I.3
Oreb, K.G.4
-
22
-
-
0029202206
-
Analysis of the measurement range in Fizeau interferometry using the moire effect
-
T. Kasai, ed., Proc. SPIE
-
B. V. Dorrío, J. Blanco-García, A. F. Doval, C. Lopez, R. Soto, J. L. Fernández, and M. Perez-Amor, “Analysis of the measurement range in Fizeau interferometry using the moire effect, ” in International Conference on Optical Fabrication and Testing, T. Kasai, ed., Proc. SPIE 2576, 204-218 (1995).
-
(1995)
International Conference on Optical Fabrication and Testing
, vol.2576
, pp. 204-218
-
-
Dorrío, B.V.1
Blanco-García, J.2
Doval, A.F.3
Lopez, C.4
Soto, R.5
Fernández, J.L.6
Perez-Amor, M.7
-
23
-
-
84975589999
-
Digital holographic interference-phase measurement using the Fourier-transform method
-
T. Kreis, “Digital holographic interference-phase measurement using the Fourier-transform method, ” J. Opt. Soc. Am. A 3, 847-855 (1986).
-
(1986)
J. Opt. Soc. Am. A
, vol.3
, pp. 847-855
-
-
Kreis, T.1
-
24
-
-
84975624459
-
Fast Fourier transform, iteration, and least-squares-fit demodulation image processing for analysis of single-carrier fringe pattern
-
J. Gu and F. Chen, “Fast Fourier transform, iteration, and least-squares-fit demodulation image processing for analysis of single-carrier fringe pattern, ” J. Opt. Soc. Am. A 12, 2159-2164 (1995).
-
(1995)
J. Opt. Soc. Am. A
, vol.12
, pp. 2159-2164
-
-
Gu, J.1
Chen, F.2
-
25
-
-
84975633439
-
Influence of aberrations interferometer elements on measurements errors
-
R. Jozwicki, “Influence of aberrations interferometer elements on measurements errors, ” Appl. Opt. 30, 3126-3132 (1991).
-
(1991)
Appl. Opt.
, vol.30
, pp. 3126-3132
-
-
Jozwicki, R.1
-
26
-
-
0010362708
-
Multiple-beam interferometry: Intensity distribution in the reflected system
-
J. Holden, “Multiple-beam interferometry: intensity distribution in the reflected system, ” Proc. Phys. Soc. London 62, 405-417 (1949).
-
(1949)
Proc. Phys. Soc. London
, vol.62
, pp. 405-417
-
-
Holden, J.1
|