A Level Set Approach to a Unified Model for Etching, Deposition, and Lithography

Journal of Computational Physics

Volumn 138, Issue 1, 1997, Pages 193-223

  Adalsteinsson, D ^a   Sethian, J A ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ETCHING; HYPERBOLIC FUNCTIONS; LITHOGRAPHY; TOPOGRAPHY; VISIBILITY;

DEPOSITION PROCESS; FLUX FUNCTION; LEVEL SET APPROACH; LEVEL SET FORMULATIONS; RE-EMISSION; REDEPOSITION; THREE-DIMENSIONAL TOPOGRAPHY; TOPOGRAPHY SIMULATION; TWO DIMENSIONAL TOPOGRAPHY; UNIFIED MODELING;

DEPOSITION;

EID: 0038873881     PISSN: 00219991     EISSN: None     Source Type: Journal    
DOI: 10.1006/jcph.1997.5817     Document Type: Article

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