Laminar versus trapezoidal grating profiles: AFM measurements and efficiency simulations

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3150, Issue , 1997, Pages 121-129

  Reichardt, Gerd ^a   Schäfers, Franz ^a  

^a HAHN MEITNER INSTITUT   (Germany)

Author keywords

Atomic force microscopy; Diffraction efficiency; Efficiency simulation; Grating profiles; Laminar; Reflection gratings; Second order suppression; Trapezoidal

Indexed keywords

ATOMIC FORCE MICROSCOPY; ATOMIC PHYSICS; ATOMS; DIFFRACTION; DIFFRACTION EFFICIENCY; ELECTROMAGNETIC WAVES; MONOCHROMATORS; REFLECTION; SYNCHROTRON RADIATION; SYNCHROTRONS;

EFFICIENCY SIMULATION; GRATING PROFILES; LAMINAR; REFLECTION GRATINGS; SECOND ORDER SUPPRESSION; TRAPEZOIDAL;

POLARIZATION;

EID: 0038873538     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.279367     Document Type: Conference Paper

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