Deep ion implantation: Advantages and current problems

Nukleonika

Volumn 44, Issue 2, 1999, Pages 271-276

  Slowinski B ^a,b  

^a WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^b INSTITUTE OF ATOMIC ENERGY   (Poland)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038850168     PISSN: 00295922     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (8)

1. Lehmann Chr.: Interaction of Radiation with Solids and Elementary Defects Production. North-Holland Publishing Company. Amsterdam. New York. Oxford (1977); J.S. Williams and J.M. Poate. In: Ion Implantation and Beam Processing. Academic Press, Sydney-New York-London 1984.
2. Lehmann Chr.: Interaction of Radiation with Solids and Elementary Defects Production. North-Holland Publishing Company. Amsterdam. New York. Oxford (1977); J.S. Williams and J.M. Poate. In: Ion Implantation and Beam Processing. Academic Press, Sydney-New York-London 1984.
3. Didyk Y. A.: Radiation defectiveness of solids and modification of materials irradiated with heavy ions at energies above 1 MeV/u. D.Sc.Thesis. Dubna 1995.
4. Didyk Y. A. and Skuratov V. A. In: JINR Comm. 14-96-159. Dubna, 1996.
5. Słowiński B., Wilczyńska T., Wiśniewski R.: Nukleonika 44, 2, 277-280, 1999.
6. Słowiński B., Wiśniewski R.: JINR Comm., E-14-89-512, Dubna, 1989.
7. Bacmeister G. U., Petersen F. and Enge W.: In: GSI Scientific Report 1994, p.191.
8. Rose M., Balogh A. G., Hahn H.: In: GSI Scientific Report 1994, p.134.