The oxidation kinetics of thin copper films studied by resistivity measurements

Zeitschrift fur Naturforschung - Section A Journal of Physical Sciences

Volumn 54, Issue 2, 1999, Pages 117-123

  Rauh, M ^a   Finzel, H U ^b   Wissmann P ^a  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b NIEDERRHEIN UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Kinetics; Oxidation; Resistivity; Thin Metal Films

Indexed keywords

EID: 0038848304     PISSN: 09320784     EISSN: None     Source Type: Journal    
DOI: 10.1515/zna-1999-0205     Document Type: Article

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