Oxidation of silicon (100): Experimental data versus a unified chemical model

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 14, Issue 4, 1996, Pages 2840-2844

  Thanikasalam, P ^a   Whidden, T K ^a   Ferry, D K ^a  

^a ARIZONA STATE UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038809676     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.588842     Document Type: Article

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