A study on the characteristics of (Ti1-xAlx)N coatings deposited by plasma-enhanced chemical vapor deposition after heat treatment

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 371-374

  Lee, S H ^a   Lim, J W ^a   Lee, D K ^a   Han, Y H ^a   Lee, J J ^a  

^a Seoul National University   (South Korea)

Author keywords

(Ti1 xAlx)N; Heat treatment; Plasma enhanced chemical vapor deposition (PECVD); Precipitation

Indexed keywords

HARDNESS; PHASE TRANSITIONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; TITANIUM COMPOUNDS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

HIGH-SPEED STEEL (HSS);

COATINGS;

COATING; HEAT TREATMENT; PLASMA TREATMENT; SURFACE TREATMENT; TITANIUM NITRIDE; VAPOR DEPOSITION;

EID: 0038807490     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00044-6     Document Type: Article

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