Response to ethanol of thin films based on Mo and Ti oxides deposited by sputtering

Sensors and Actuators, B: Chemical

Volumn 93, Issue 1-3, 2003, Pages 409-415

  Comini, Elisabetta ^a   Sberveglieri, Giorgio ^a   Ferroni, Matteo ^b   Guidi, Vincenzo ^c   Martinelli, Giuliano ^b  

^a UNIVERSITY OF BRESCIA   (Italy)

^b INFM   (Italy)

^c INFN SEZIONE DI FERRARA   (Italy)

Author keywords

Ethanol; Gas sensors; Molybdenum oxide; Titania

Indexed keywords

ANNEALING; COALESCENCE; DEPOSITION; ETHANOL; MOLYBDENUM COMPOUNDS; SPUTTERING; THIN FILMS; TITANIUM DIOXIDE;

RADIO FREQUENCY (RF);

CHEMICAL SENSORS;

EID: 0038787827     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-4005(03)00185-0     Document Type: Conference Paper

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