Simulation of leakage current in thin films with dead layers

Integrated Ferroelectrics

Volumn 47, Issue , 2002, Pages 197-206

  Schroeder, H ^a   Schmitz, S ^a   Meuffels, P ^a  

^a FORSCHUNGSZENTRUM JÜLICH   (Germany)

Author keywords

Bulk or interface limited leakage current; Finite difference method; Simulation; Thin films, dead layers

Indexed keywords

CAPACITORS; COMPUTER SIMULATION; CURRENT DENSITY; MIM DEVICES; PERMITTIVITY; THERMIONIC EMISSION; THIN FILMS;

BULK-LIMITED LEAKAGE CURRENT; DEAD LAYERS; INTERFACE-LIMITED LEAKAGE CURRENT; RICHARDSON CONSTANT;

LEAKAGE CURRENTS;

EID: 0038747890     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580215415     Document Type: Article

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