Interferometric translation-rotation encoder using diffraction gratings

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3450, Issue , 1998, Pages 46-54

  Neviere M ^a   Popov, E ^b   Bojhkov, B ^b   Tsonev, L ^b   Tonchev, S ^b  

^a AIX MARSEILLE UNIVERSITY   (France)

^b INSTITUTE OF SOLID STATE PHYSICS   (Bulgaria)

Author keywords

[No Author keywords available]

Indexed keywords

DATA PROCESSING; DIELECTRIC MATERIALS; ENCODING (SYMBOLS); INTERFEROMETRY; LIGHT REFLECTION; LIGHT TRANSMISSION;

TRANSLATION-ROTATION ENCODERS;

DIFFRACTION GRATINGS;

EID: 0038747149     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.323414     Document Type: Conference Paper

References (0)