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Volumn 119-121, Issue , 2003, Pages 113-116
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Si-Zr alloy thin-film anodes for microbatteries
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Author keywords
Lithium battery; Microbattery; Thin film anode; Thin film battery; Zr Si
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Indexed keywords
ANODES;
ARGON;
ATOMIC FORCE MICROSCOPY;
COPPER;
ELECTROCHEMISTRY;
ELECTROMECHANICAL DEVICES;
ENERGY DISPERSIVE SPECTROSCOPY;
RUTHERFORD BACKSCATTERING SPECTROSCOPY;
SILICON ALLOYS;
SPUTTERING;
SUBSTRATES;
THIN FILMS;
X RAY DIFFRACTION ANALYSIS;
ZIRCONIUM;
MICROBATTERIES;
LITHIUM BATTERIES;
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EID: 0038746737
PISSN: 03787753
EISSN: None
Source Type: Journal
DOI: 10.1016/S0378-7753(03)00137-X Document Type: Conference Paper |
Times cited : (31)
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References (9)
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