Electrostatically actuated membrane mirrors for adaptive optics

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4985, Issue , 2003, Pages 250-258

  Kurczynski, Peter ^a,b   Bogart, Gregory R ^a   Lai, Warren Y C ^a,c   Lifton, Victor ^a   Mansfield, William M ^a,c   Anthony Tyson, J ^a   Sadoulet, Bernard ^b   Williams, David R ^d  

^a LUCENT TECHNOLOGIES   (United States)

^b UNIVERSITY OF CALIFORNIA   (United States)

^c New Jersey Nanotechnology Consortium   (United States)

^d UNIVERSITY OF ROCHESTER   (United States)

Author keywords

Adaptive optics; Deformable mirrors; MEMS; Micromirrors; MOEMS; Optical MEMS

Indexed keywords

ADAPTIVE OPTICS; ASTRONOMY; CERAMIC MATERIALS; ELECTRODES; ELECTROSTATICS; MIRRORS; REACTIVE ION ETCHING; SILICON; SINGLE CRYSTALS;

MEMBRANE MIRRORS;

MICROELECTROMECHANICAL DEVICES;

EID: 0038733975     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.473642     Document Type: Conference Paper

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