DFT calculations of polymer/gold substrate adhesion in wafer fabrication

Journal of Materials Science

Volumn 38, Issue 8, 2003, Pages 1727-1729

  Wu, Ping ^a   Jin, Hong Mei ^a   Liu, Hong Lin ^a  

^a INSTITUTE OF HIGH PERFORMANCE COMPUTING   (Singapore)

Author keywords

[No Author keywords available]

Indexed keywords

CALCULATIONS; COMPOSITION EFFECTS; CRYSTAL STRUCTURE; GOLD; IMPURITIES; MATHEMATICAL MODELS; POLYMERS; PROBABILITY DENSITY FUNCTION; REMOVAL;

CRYSTAL FACES; WAFER FABRICATION;

ADHESION;

EID: 0038731070     PISSN: 00222461     EISSN: None     Source Type: Journal    
DOI: 10.1023/A:1023227726751     Document Type: Article

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