Imaging of a laser plasma source at 13 nm wavelength approaching submicrometer resolution

Journal De Physique. IV : JP

Volumn 104, Issue , 2003, Pages 153-156

  Fruke R ^a   Wilhein, T ^a   Wieland, M ^a   Vogt, U ^a  

^a UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

CHARGE COUPLED DEVICES; CONFORMAL MAPPING; ETHANOL; LASER PRODUCED PLASMAS; LITHOGRAPHY; NEODYMIUM LASERS; OPTICAL MICROSCOPY; ULTRAVIOLET RADIATION;

LASER ENERGIES; PERIODIC STRUCTURE; SUBMICROMETER RESOLUTION;

PLASMA SOURCES;

EID: 0038730806     PISSN: 11554339     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1051/jp4:200300051     Document Type: Conference Paper

References (2)

1. D. Attwood, Soft X-rays and extreme ultraviolet radiation, University of California, Cambridge University Press, 1999, pp. 189-266
2. U. Vogt, M. Wieland, T. Wilhein, A zone plate monochromator for laboratory soft X-ray sources Rev. Sci. Instr., 72 (1), 2001, pp. 53-57