Measurement of phase differences between the diffracted orders of deep relief gratings

Optics Letters

Volumn 28, Issue 9, 2003, Pages 683-685

  Cordeiro, C M B ^a   Cescato, L ^a   Freschi, A A ^b   Li, Lifeng ^c  

^a UNIVERSITY OF CAMPINAS   (Brazil)

^b SÃO PAULO STATE UNIVERSITY UNESP   (Brazil)

^c TSINGHUA UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

MATHEMATICAL TRANSFORMATIONS; OPTICAL FILMS; PERTURBATION TECHNIQUES; PHOTORESISTS;

PHOTORESIST FILMS;

DIFFRACTION GRATINGS;

EID: 0038706086     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.28.000683     Document Type: Article

References (8)

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