Monolithic integration of a silicon micromotor in combination with the CMOS drive circuit on one chip

Microelectronic Engineering

Volumn 67-68, Issue , 2003, Pages 390-396

  Horstmann, J T ^a   Goser, K F ^a  

^a TU DORTMUND UNIVERSITY   (Germany)

Author keywords

CMOS technology; Intelligent microsystems; MEMS; Micromotor; Monolithic system integration

Indexed keywords

ACTUATORS; FABRICATION; MICROMACHINING; MICROPROCESSOR CHIPS; OSCILLATORS (ELECTRONIC); SENSORS;

MICROMOTORS;

CMOS INTEGRATED CIRCUITS;

EID: 0038697323     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0167-9317(03)00094-7     Document Type: Conference Paper

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