Life cycle inventory development for wafer fabrication in semiconductor manufacturing

IEEE International Symposium on Electronics and the Environment

Volumn , Issue , 2003, Pages 276-281

  Murphy, Cynthia F ^a   Laurent, Jean Philippe ^a   Allen, David T ^a  

^a UNIVERSITY OF TEXAS AT AUSTIN   (United States)

Author keywords

Chemical vapor deposition (CVD); Life cycle inventory; Mass energy balance; Thermal oxidation; Wafer clean; Wafer fabrication

Indexed keywords

CHEMICAL VAPOR DEPOSITION; INTEGRATED CIRCUIT MANUFACTURE; INVENTORY CONTROL; LIFE CYCLE; MASS TRANSFER; PRODUCT DEVELOPMENT; SEMICONDUCTOR DEVICE MANUFACTURE; SILICON WAFERS;

LIFE CYCLE INVENTORY DEVELOPMENT; MASS ENERGY BALANCE; THERMAL OXIDATION; WAFER FABRICATION;

ELECTRONICS INDUSTRY;

EID: 0038690116     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (3)

1. ISMT, International Technology Roadmap for Semiconductors, 2001 Edition, International SEMATECH, Austin TX (2001).
2. Schuppe, Jennifer L., Design of a Life Cycle Inventory Methodology for Semiconductor Manufacturing, Master's thesis, University of Texas at Austin, Austin, TX, (2002).
3. Nishi, Yoshio and Doering, Robert (eds), Handbook of Semiconductor Manufacturing Technology, Marcel Dekker, New York (2000).