Development of SF6 decomposition gas sensor

Surface and Coatings Technology

Volumn 169-170, Issue , 2003, Pages 643-645

  Minagawa, T ^a   Kawada, M ^a   Yamauchi, S ^a   Kamei, M ^a   Nishida, C ^a  

^a MITSUBISHI ELECTRIC CORPORATION   (Japan)

Author keywords

Sandblasting; Scanning electron microscopy (SEM); Solid electrolytes; Sputtering; Thin films

Indexed keywords

CHEMICAL SENSORS; DECOMPOSITION; ELECTRIC SWITCHGEAR; ELECTRODES; GOLD; IONIC CONDUCTION IN SOLIDS; SOLID ELECTROLYTES; SURFACE ROUGHNESS;

GAS-INSULATED SWITCHGEARS (GIS);

SULFUR COMPOUNDS;

DECOMPOSITION; GAS; SCANNING ELECTRON MICROSCOPY; SENSOR; SPUTTERING;

EID: 0038685800     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0257-8972(03)00095-1     Document Type: Article

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