The protection of MgO film against hydration by using Al2O3 capping layer deposited by magnetron sputtering method

Thin Solid Films

Volumn 435, Issue 1-2, 2003, Pages 199-204

  Eun, Jae Hwan ^a   Lee, Jung Heon ^a   Kim, Soo Gil ^b   Um, Myung Yoon ^a   Park, Sun Young ^a   Kim, Hyeong Joon ^a,c  

^a Seoul National University   (South Korea)

^b Gachon University College of Medicine   (South Korea)

^c NONE   (South Korea)

Author keywords

AC Plasma display panel (AC PDP); Al2O3 capping layer; Hydration; MgO protective layer

Indexed keywords

ALUMINUM COMPOUNDS; ATMOSPHERIC HUMIDITY; HYDRATION; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; MORPHOLOGY; SCANNING ELECTRON MICROSCOPY; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

ELECTRON BINDING ENERGY;

THIN FILMS;

EID: 0038685666     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(03)00362-6     Document Type: Conference Paper

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