Growth process and surface acoustic wave characteristics of LiNbO3/Diamond/Silicon multilayered structures

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 2 A, 2003, Pages 572-574

  Dogheche, Elhadi ^a   Lansiaux, Xavier ^a   Remiens, Denis ^a   Sadaune, Veronique ^a   Chauvin, Stephanie ^a   Gryba, Tadeusz ^a  

^a INSTITUT D ELECTRONIQUE   (France)

Author keywords

Diamond substrate; LiNbO3; Magnetron sputtering; Multi step; Surface acoustic wave filter

Indexed keywords

ACOUSTIC WAVE VELOCITY; ATOMIC FORCE MICROSCOPY; CRYSTAL STRUCTURE; DIAMOND FILMS; FILM GROWTH; MAGNETRON SPUTTERING; MORPHOLOGY; SEMICONDUCTING SILICON; THICK FILMS; TRANSDUCERS; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

MULTI STEP PROCESS; MULTILAYERED STRUCTURES; RADIO FREQUENCY MAGNETRON SPUTTERING; SURFACE ACOUSTIC WAVE CHARACTERISTICS;

LITHIUM NIOBATE;

EID: 0038682125     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.42.572     Document Type: Article

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