Computer-aided chemistry estimation method of electronic-polarization dielectric constants for the molecular design of low-k materials

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 42, Issue 1, 2003, Pages 157-161

  Takahagi, Takayuki ^a   Saiki, Atsushi ^a   Sakaue, Hiroyuki ^a   Shingubara, Shoso ^a  

^a HIROSHIMA UNIVERSITY   (Japan)

Author keywords

Computer aided chemistry; Dielectric constant; Low k material; MNDO and Chem Drew; Molecular density; MOPAC; Packing factor; Polymer

Indexed keywords

CHEMISTRY; COMPUTATIONAL METHODS; COMPUTER AIDED ENGINEERING; COMPUTER AIDED SOFTWARE ENGINEERING; ELECTROMAGNETIC WAVE POLARIZATION; INTEGRATED CIRCUIT MANUFACTURE; MOLECULAR STRUCTURE; PERMITTIVITY; ULSI CIRCUITS;

COMPUTER AIDED CHEMISTRY ESTIMATION METHODS; ELECTRONIC POLARIZATION; MOLECULAR DESIGN; MOLECULAR ORBITAL PACKAGE;

DIELECTRIC MATERIALS;

EID: 0038682078     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/JJAP.42.157     Document Type: Article

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