Removing drift from scanning probe microscope images of periodic samples

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 16, Issue 1, 1998, Pages 51-53

  Woodward, John T ^a   Schwartz, Daniel K ^a  

^a Tulane University   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0038672543     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.589834     Document Type: Article

References (5)

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3. V. Y. Yurov and A. N. Klimov, Rev. Sci. Instrum. 65, 1551 (1994).
4. R. Staub, D. Alliata, and C. Nicolini, Rev. Sci. Instrum. 66, 2513 (1995).
5. K. Schouterden, B. M. Lairson, and M. H. Azarian, J. Vac. Sci. Technol. B 14, 3445 (1996).