The use of fluoropolymers to protect semiconductor materials

Journal of Fluorine Chemistry

Volumn 122, Issue 1, 2003, Pages 121-124

  Extrand, Chuck W ^a  

^a ENTEGRIS INC   (United States)

Author keywords

Fabrication; Fluoropolymers; Microelectronics processing

Indexed keywords

FLUORINE DERIVATIVE; POLYMER;

CONTROLLED STUDY; ELECTRONICS INDUSTRY; PHYSICAL CHEMISTRY; REVIEW; SEMICONDUCTOR; SURFACE PROPERTY;

EID: 0038648073     PISSN: 00221139     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0022-1139(03)00103-9     Document Type: Article

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