Silicon sensor integration to form smart sensors

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4935, Issue , 2002, Pages 378-385

  Gourdeas, Leon ^a,b   James, Daniel A ^a,b   Thiel, David V ^a,b   See, Le Lian ^a,b  

^a GRIFFITH UNIVERSITY   (Australia)

^b CRC for MicroTechnoloay   (Australia)

Author keywords

Interconnection; Smart sensors; Very large scale integration VLSI

Indexed keywords

CMOS INTEGRATED CIRCUITS; ETCHING; MICROMACHINING; OPERATIONAL AMPLIFIERS; SCHOTTKY BARRIER DIODES; VLSI CIRCUITS;

THERMOMIGRATION;

SILICON SENSORS;

EID: 0038640459     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.469077     Document Type: Conference Paper

References (5)

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