Crystallization of sol-gel derived precursor zinc oxide film during KrF excimer laser irradiation

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4830, Issue , 2002, Pages 296-300

  Hayashi, Kazuyuki ^a   Ooie, Toshihiko ^b   Nagase, Toshimi ^b   Shinozaki, Tatsuya ^b   Araki, Takao ^a  

^a EHIME UNIVERSITY   (Japan)

^b AIST Shikoku   (Japan)

Author keywords

Crystallization; Excimer laser irradiation; Morphology; Sol gel method; Zinc oxide film

Indexed keywords

ATOMIC FORCE MICROSCOPY; CRYSTALLIZATION; EXCIMER LASERS; LASER BEAM EFFECTS; MORPHOLOGY; SOL-GELS;

TIME-RESOLVED MEASUREMENTS;

ZINC OXIDE;

EID: 0038636324     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.499712     Document Type: Conference Paper

References (3)

1. T. Nagase, T. Ooie, J. Sakakibara: Thin Solid Filins, 357, (1999) 151-158.
2. Toshimi Nagase, Toshihiko Ooie, Yoji Makita, Masahiro Nakatsuka, Kazuo Shinozaki and Nobuyasu Mizutani: Jpn. J. Appl. Phys., 39, (2000) pp. L713-L715.
3. Toshimi Nagase, Toshihiko Ooie, Yoji Makita, Shuji Kasaishi, Masahiro Nakatsuka and Nobuyasu Mizutani: Jpn. J. Appl. Phys., 40, (2001) pp. L6296-L6303.