High-precision, multiple degree-of-freedom piezoelectric actuator

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3519, Issue , 1998, Pages 110-117

  Chang, Timothy ^a   Sun, Xuemei ^a   Pappano, Vincenzo ^a   Ji, Zhiming ^b   Caudill, Reggie ^a  

^a NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

^b NEW JERSEY INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Input shaping; Micropositioner; Piezoelectric Actuator; Resonance compensation

Indexed keywords

COMPUTER CONTROL SYSTEMS; DEGREES OF FREEDOM (MECHANICS); DIGITAL SIGNAL PROCESSING; FEEDBACK CONTROL; MICROMANIPULATORS; PIEZOELECTRIC DEVICES;

MICROPOSITIONER; PIEZOELECTRIC ACTUATOR; RESONANCE COMPENSATION;

MICROACTUATORS;

EID: 0038636168     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.325731     Document Type: Conference Paper

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