Performance modeling of optical metrology systems

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4852, Issue 2, 2002, Pages 839-848

  Dutta, Kalyan ^a   Benson, Robert S ^a  

^a LOCKHEED MARTIN   (United States)

Author keywords

Coherent heterodyne detection; Diffraction modeling; Optical metrology; Simulation; Wave propagation

Indexed keywords

CALCULATIONS; COMPUTER SIMULATION; DIFFRACTION; LIGHT MEASUREMENT; LIGHT PROPAGATION; MATHEMATICAL MODELS; MEASUREMENT ERRORS; RAY TRACING; SIGNAL DETECTION; WAVEFRONTS;

COHERENT HETERODYNE DETECTION; OPTICAL GAGES; OPTICAL METROLOGY SYSTEMS;

OPTICAL SYSTEMS;

EID: 0038626621     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.460878     Document Type: Conference Paper

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