Automatic measurement of surface height with the interferoscope

Optical Engineering

Volumn 35, Issue 10, 1996, Pages 2938-2942

  Carlsson, Torgny E ^a,b   Abramson, Nils H ^a,b   Fischer, Kai H ^a  

^a ROYAL INSTITUTE OF TECHNOLOGY   (Sweden)

^b SPIE ^*

Author keywords

Grazing incidence interferometry; Image processing; Interferometry; Interferoscope; Surface shape measurement

Indexed keywords

EID: 0038581816     PISSN: 00913286     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.600977     Document Type: Article

References (13)

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