Diffusion of hydrogen in undoped, p-type and n-type doped diamonds

Diamond and Related Materials

Volumn 12, Issue 3-7, 2003, Pages 623-631

  Saguy, C ^a   Cytermann, C ^a   Fizgeer, B ^a   Richter, V ^a   Avigal, Y ^a   Moriya, N ^a   Kalish, R ^a   Mathieu, B ^b   Deneuville, A ^b  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

^b CNRS   (France)

Author keywords

Defects; Diamond film; Diffusion; Implantation; Impurities; Natural diamond

Indexed keywords

ANNEALING; CHEMICAL VAPOR DEPOSITION; DIAMONDS; DIFFUSION; DOPING (ADDITIVES); ION IMPLANTATION;

HYDROGEN PLASMA;

HYDROGEN;

DIAMOND;

EID: 0038576360     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(02)00403-X     Document Type: Article

References (35)

1. Maclear, R. D., Butler, J. D., & Connel, S. H. (1999). Diamond Relat. Mater.. 8 1615.
2. Chevallier, J., Theys, B., Lusson, A., Grattepain, C., Deneuville, A., & Gheeraert, E. (1998). Phys. Rev. B. 58 7966.
3. Cui, J. B., Ristein, J., & Ley, L. (1998). Phys. Rev. Lett.. 81 429.
4. Hayashi, K., Yamanaka, S., Watanabe, H., Sekiguchi, T., Okushi, H., & Kajimura, K. (1997). J. Appl. Phys.. 81 744.
5. Pearton, S. J., Corbett, J. W., & Stravola, M. (1992). Hydrogen in Crystalline Semiconductors. Spring Series in Materials Science 16. Berlin: Springer.
6. Uzan-Saguy, C., Reznik, A., & Cytermann, C. (2001). Diamond Relat. Mater.. 10 453.
7. Chevallier, J., Lusson, A., & Ballutaud, D. (2001). Diamond Relat. Mater.. 10 399.
8. Kajihara, S. A., Antonelli, A., Bernholc, J., & Car, R. (1991). Phys. Rev. Lett.. 66 2010.
9. Goss, J. P., Jones, R., Heggie, M. I., Ewels, C. P., Bridon, P. R., & Oberg, S. (2002). Phys. Rev. B. 65 115207.
10. Mehandru, S. P., & Anderson, A. B. (1994). J. Mater. Res.. 9 383.
11. Saada, D., Adler, J., & Kalish, R. (2000). Phys. Rev. B. 61 10711.
12. Shimizu, A., Tachikawa, H., & Inagaki, M. (2000). Solid State Ionics. 127 157.
13. Estle, T. L., Estreicher, S., & Marynick, D. S. (1987). Phys. Rev. Lett.. 58 1547.
14. Holzschuh, E., Kundig, W., & Meier, P. F. (1982). Phys. Rev. A. 25 1272.
15. Maki, T., Shikama, S., Komori, M., Sakaguchi, Y., Sakuta, K., & Kobayashi, T. (1992). Jpn. J. Appl. Phys.. 31 L1446.
16. Fuchs, F., Wild, C., Schwarz, K., & Koidl, P. (1995). Diamond Relat. Mater.. 4 652.
17. Zaitsev, A. M. (2001). Properties, growth and applications of diamond. In M. H. Nazare, & A. J. Neves (Eds.), EMIS Datareviews Series no. 26, 155.
18. Liao, C., Wang, Y., & Yang, S. (1999). Diamond Relat. Mater.. 8(9), 1229.
19. Haug, C., Gartner, H., Portmann, J., Samlenski, R., Wild, C., & Brenn, R. (2001). Diamond Relat. Mater.. 10 411.
20. Machi, I. Z., Butler, J. E., & Connel, S. H. (1999). Diamond Relat. Mater.. 8 1611.
21. Zeisel, R., Nebel, C. E., & Stutzmann, M. (1999). Appl. Phys. Lett.. 74 1875.
22. Zeisel, R., Nebel, C. E., & Stutzmann, M. (2000). Diamond Relat. Mater.. 9 413.
23. Uzan-Saguy, C., Cyterman, C., & Fizgeer, B. (2002). Diamond Relat. Mater.. 11 316.
24. Chevallier, J. (2002). Hydrogen diffusion and acceptor passivation in diamond. In C. Nebel, & J. Ristein (Eds.), Thin Film Diamond, Academic Press.
25. Ballutaud, D., Jomard, F., & Le Digou, J. (2000). Diamond Relat. Mater.. 9 1171.
26. Laikhtman, A., Hoffman, A., & Cytermann, C. (2001). Appl. Phys. Lett.. 79 1115.
27. Chevallier, J., Jomard, F., & Teukam, Z. (2002). Diamond Relat. Mater.. 11 1566.
28. C. Uzan-Saguy, C. Cytermann, unpublished results
29. Uzan-Saguy, C., Cytermann, C., & Fizgeer, B. (2002). Phys. Stat. Sol.. 193 508.
30. Fontaine, F., Uzan-Saguy, C., Philosoph, B., & Kalish, R. (1996). Appl. Phys. Lett.. 68 2264.
31. Prins, J. (1989). Phys. Rev. B. 39 1562.
32. Biersack, J. P., & Haggenark, L. G. (1980). Nucl. Instr. Phys. Res.. 174 257.
33. Popovicci, G., Sung, T., Khasawinah, S., & Prelas, M. A. (1995). J. Appl. Phys.. 77 5625.
34. Teukam, Z., Ballutaud, D., Jomard, F., Chevallier, J., Bernard, M., & Deneuville, A. (2003). Diamond Relat. Mater.. 12
35. Tomita, M., Takahashi, F., & Homma, Y. (1994). Nucl. Instr. Methods: Phys. Res. B. 85 399.