Fabrication of MgB2 thin film by rf magnetron sputtering

Physica C: Superconductivity and its Applications

Volumn 388-389, Issue , 2003, Pages 127-128

  Ahn, Jong Rok ^a   Lee, Soon Gul ^a   Hwang, Yunseok ^a   Sung, Gun Yong ^b   Kim, Do Kyung ^c  

^a Korea University   (South Korea)

^b Electronics and Telecommunications Research Institute (ETRI)   (South Korea)

^c Korea Advanced Institute of Science and Technology (KAIST)   (South Korea)

Author keywords

MgB2 thin film; Sputtering; Superconducting

Indexed keywords

ANNEALING; FABRICATION; MAGNESIUM COMPOUNDS; MAGNETRON SPUTTERING; SUBSTRATES; SUPERCONDUCTING TRANSITION TEMPERATURE;

SINGLE TARGET SPUTTERING;

SUPERCONDUCTING FILMS;

EID: 0038527303     PISSN: 09214534     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0921-4534(02)02368-7     Document Type: Conference Paper

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