Simulations of temperature field in HFCVD diamond films over large area

Journal of Materials Science and Technology

Volumn 19, Issue 1, 2003, Pages 22-26

  Wang, Aiying ^a   Sun, Chao ^a   Huang, Rongfang ^a   Wen, Lishi ^a  

^a INSTITUTE OF METAL RESEARCH   (China)

Author keywords

Diamond film; HFCVD; Simulation; Temperature field

Indexed keywords

DEPOSITION; NUCLEATION; SIMULATION; SUBSTRATES;

DIAMOND FILM; EMISSIVITY; HOT FILAMENT CHEMICAL VAPOR DEPOSITION; TEMPERATURE FIELD;

FILMS;

EID: 0038506362     PISSN: 10050302     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (27)

1. S.Matsumoto, Y.Sato, M.Tsutsumi and N.Setaka: J. Mater. Sci., 1982, 17, 3106.
2. S.Matsumoto, Y.Sato, M.Kamo and N.Setaka: Jpn. J. Appl. Phys., 1982, 21, 83.
3. M.Kamo, Y.Sato, S.Matsumoto and N.Setaka: J. Cryst. Growth., 1983, 62, 642.
4. K.Suzuki, A.Sawabe, H.Yasuda and T.Inuzuka: Appl. Phys. Lett., 1987, 50, 431.
5. K.Kurihara, K.Sasaki, K.Kawarada and N.Koshino: Appl. Phys. Lett., 1987, 52, 437.
6. Y.Hirose and N.Konda: Program and Book of Abstracts Japan Applied Physics, spring meeting, March 29, 1988, 434.
7. H.C.Tsai and D.B.Bogy: J. Vac. Sci. Technol., 1987, A5, 3287.
8. S.C.Sharma, M.Green, R.C.Hyer, C.A.Dark and T.D.Black: J. Mater. Res., 1990, 5, 2424.
9. M.R.Shen, H.Wang, Z.Y.Ning, C.Ye and Z.X.Ren: J. Phys. Condens. Mater., 1996, 8, 8953.
10. C.P.Chang, D.L.Flamm, D.E.Ibbotson and J.A.Mucha; J. Appl. Phys., 1988, 63, 1744.
11. K.V.Ravi: J. Mater. Res., 1992, 7, 384.
12. M.W.Geis: Appl. Phys. Lett., 1989, 55, 550.
13. Yan CHEN, Rongfang HUANG, Lishi WEN and C.X.SHI: Chinese J. Mater. Res., 1995, 9, 245. (in Chinese)
14. C.Sun, W.J.Zhang, N.Wang, C.Y.Chan, I.Bello, C.S.Lee and S.T.Lee: J. Appl. Phys., 2000, 88, 3354.
15. E.Kondon, T.Ohta, T.Mitomo and K.Ohtsuka: J. Appl. Phys., 1992, 72, 705.
16. C.Wolden, S.Mitra and K.K.Gleason: J. Appl. Phys., 1992, 72, 3750.
17. D.Y.Liu, R.F.Huang, J.Yu, L.S.Wen and C.X.Shi: Chinese J. Mater. Res., 1996, 10, 279.
18. Xinhong CHENG: Master Thesis, Institute of Metal Research, Chinese Academy of Sciences, June, 1997. (in Chinese)
19. G.H.Song, C.Sun, R.F.Huang, L.S.Wen and C.X.Shi: Surf. Coat. Technol., 2000, 131, 500.
20. X.M.Song, B.Wang, X.W.Zhang, S.J.Zhang, G.H.Chen and H.Yan: J. Syn. Crys., 2000, 29, 269.
21. V.P.Isachenko: Theory of Heat Transfer, Higher Education Publisher, Beijing, 1986, 468.
22. L.C.Thomas: Heat Transfer, Prentice-Hall Inc. Englewood Cliffs, New Jersey, 1992, 262.
23. Guihong SONG: Ph.D.Thesis, Institute of Metal Research, Chinese Academy of Sciences, June, 2000. (in Chinese)
24. Yan CHEN: Ph.D. Thesis, Institute of Metal Research, Chinese Academy of Sciences, June, 1993. (in Chinese)
25. D.G.Goodwill and G.G.Gavillet: J. Appl. Phys. 1990, 68, 6393.
26. T.Debroy, K.Tankala, W.A.Yarbrough and R.Messier: Appl. Phys., 1990, 68, 2424.
27. F.Jansen, M.A.Machonkin and D.E.Kuhman: J. Vac. Sci. Technol., 1990, A8, 3785.