Characterisation of microfluidic devices

IEEE International Conference on Microelectronic Test Structures

Volumn , Issue , 2002, Pages 211-215

  Bien, D C S ^a   Mitchell, S J N ^a   Gamble, H S ^a  

^a QUEEN'S UNIVERSITY BELFAST   (United Kingdom)

Author keywords

MEMS; Microfluidic; Micromachining; Microvalves; Polysilicon

Indexed keywords

MICROELECTRONIC PROCESSING; MICROMACHINING; NUMERICAL METHODS; POLYSILICON; PRESSURE TRANSDUCERS; VALVES (MECHANICAL);

MICROFLUIDIC DEVICES; SILICON MICROMACHINING TECHNIQUES;

MICROELECTROMECHANICAL DEVICES;

EID: 0038495573     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

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