Test of opticlean strip coating material for removing surface contamination

Applied Optics

Volumn 39, Issue 16, 2000, Pages 2737-2739

  Bennett, Jean M ^a  

^a NAVAL AIR WARFARE CENTER   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CONTAMINATION; SILICON WAFERS; SURFACE CHEMISTRY; SURFACE ROUGHNESS;

STRIP COATING MATERIALS;

MATERIALS SCIENCE;

EID: 0038492446     PISSN: 1559128X     EISSN: 21553165     Source Type: Journal    
DOI: 10.1364/AO.39.002737     Document Type: Article

References (5)

1. J. M. Bennett, L. Mattsson, M. P. Keane, and L. Karlsson, “Test of strip coating materials for protecting optics, ” Appl. Opt. 28, 1018-1026 (1989).
2. J. M. Bennett and L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, Washington, D.C., 1999), pp. 29-33, 62-66.
3. Dantronix Research and Technologies, 180 Bayley Avenue, Platte-ville, Wisc. 53818-3505; web site: http://www.opticlean.com.
4. L. Mattsson, “Total integrated scatter measurement system for quality assessment of coatings on optical surfaces, ” in Thin Film Technologies, J. R. Jacobsson, ed., Proc. SPIE 652, 264-271 (1986).
5. American Society for Testing and Materials, “Standard Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering, ” ASTM Doc. F-1048-87, (American Society for Testing and Materials, West Consho-hocken, Pa., 1987); web site: http://www.astm.org.